DocumentCode
833843
Title
Dynamics of a microflight mechanism with magnetic rotational wings in an alternating magnetic field
Author
Miki, Norihisa ; Shimoyama, Isao
Author_Institution
Dept. of Mechano-Informatics, Univ. of Tokyo, Japan
Volume
11
Issue
5
fYear
2002
fDate
10/1/2002 12:00:00 AM
Firstpage
584
Lastpage
591
Abstract
Dynamics of a three-dimensionally movable microflight mechanism were analyzed both theoretically and experimentally. The microflight mechanism is composed of magnetic rotational wings that rotate and generate thrust in an alternating magnetic field and a body with magnetic anisotropy that contributes to attitude control. The device consisted of 2.5-mm-long wings weighing 3.5 mg which were fabricated with MEMS technology. A wing rotational frequency of 500 Hz provided enough thrust for liftoff. Experimental data obtained through high-speed camera images show good agreement with theory and also quantify the magnetic anisotropy of the microflight mechanism, which cannot be estimated theoretically. Simultaneous actuation and attitude control by an external magnetic field presented herein, which culminated in simplification and small weight of the device and thus the successful flight, is applicable to other MEMS devices.
Keywords
attitude control; dynamics; magnetic anisotropy; magnetic fields; micromachining; micromechanical devices; torque; 2.5 mm; 3.5 mg; 3D movable microflight mechanism; 500 Hz; MEMS devices; MEMS technology; alternating magnetic field; attitude control; dynamics; external magnetic field; magnetic anisotropy; magnetic rotational wings; thrust; Anisotropic magnetoresistance; Frequency; Magnetic analysis; Magnetic anisotropy; Magnetic devices; Magnetic fields; Microelectromechanical devices; Micromechanical devices; Nickel alloys; Perpendicular magnetic anisotropy;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2002.803287
Filename
1038854
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