Title :
Polarisation-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide with low propagation losses
Author :
Tang, Pingsheng ; Towner, D.J. ; Meier, A.L. ; Wessels, B.W.
Abstract :
A low-loss and polarisation-insensitive singlemode BaTiO3 thin-film waveguide is reported. Polarisation-dependent loss as low as 0.1 dB/cm at a wavelength of 1.55 μm has been achieved by a novel Si3N4 strip-loaded BaTiO3 waveguide structure. Propagation loss of less than 0.9 dB/cm for both TE and TM polarisations was measured
Keywords :
barium compounds <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; ferroelectric thin films <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; integrated optics <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; light polarisation <polaris.-insensitive Si3N4 strip-loaded BaTiO,sub>3 thin-film waveguide, low propag. losses>; optical losses <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; optical waveguides <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; silicon compounds <polaris.-insensitive Si3N4 strip-loaded BaTiO3 thin-film waveguide, low propag. losses>; 1.55 micron; BaTiO3; Si3N4; TE polarisations; TM polarisations; ferroelectric thin films; integrated optics; low propagation losses; nonlinear waveguides; polarisation-insensitive waveguide; reactive ion etching; single mode waveguide; smooth sidewalls; strip-loaded thin-film waveguide;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20031094