Thin-film technology for HTSC Josephson devices

An overview is given on different thin film preparation methods to produce YBa₂Cu₃O_7-δ thin film Josephson devices on various substrates. Beside laser deposition and ion beam etching techniques the use of inhibit technologies for patterning is discussed for the preparation of large area superconducting structures. For the deposition of large area YBa₂Cu₃O_7-δ films a heater and dry etching concept is discussed. The quality of the films is compared for all these methods to optimize the crystalline quality, the superconducting properties and the long term stability of the samples. The technology of production of high sensitive and stable Josephson devices like single junctions, dc-SQUIDs and flux transformers is important with respect to applications in nondestructive evaluation and biomagnetism.