DocumentCode :
834318
Title :
Nonequilibrium Radiation Effects in Vlsi
Volume :
25
Issue :
5
fYear :
1978
Firstpage :
1144
Lastpage :
1145
Keywords :
Circuit testing; Coupling circuits; Dosimetry; Electron beams; Large scale integration; Radiation effects; Resists; Scanning electron microscopy; Synchrotron radiation; Very large scale integration;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1978.4329492
Filename :
4329492
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=834318