• DocumentCode
    834318
  • Title

    Nonequilibrium Radiation Effects in Vlsi

  • Volume
    25
  • Issue
    5
  • fYear
    1978
  • Firstpage
    1144
  • Lastpage
    1145
  • Keywords
    Circuit testing; Coupling circuits; Dosimetry; Electron beams; Large scale integration; Radiation effects; Resists; Scanning electron microscopy; Synchrotron radiation; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1978.4329492
  • Filename
    4329492
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=834318