DocumentCode :
834446
Title :
Negative-differential transconductance characteristics at room temperature in 30-nm square-channel SOI nMOSFETs with a degenerately doped body
Author :
Kim, Kyung Rok ; Kim, Dae Hwan ; Sung, Suk-Kang ; Lee, Jong Duk ; Park, Byung-Gook
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Volume :
23
Issue :
10
fYear :
2002
Firstpage :
612
Lastpage :
614
Abstract :
Negative-differential transconductance characteristics at room temperature with a peak-to-valley ratio of about two were observed in 30-nm square-channel silicon-on-insulator nMOSFETs with degenerately doped bodies. High channel-doping concentration creates the degeneracy in the p-type body of the self-aligned SOI MOSFET and consequently, enables band-to-band tunneling between degenerate body and source-drain. I/sub DS/-V/sub DS/ curves in the negative drain bias region also show band-to-band tunneling current as in the case of forward-biased p-n tunnel junctions.
Keywords :
MOSFET; degenerate semiconductors; doping profiles; electric admittance; heavily doped semiconductors; p-n junctions; silicon-on-insulator; tunnelling; 30 nm; SIMS analysis; Si-SiO/sub 2/; Si:B-Si:As; band-to-band tunneling; degenerately doped body; forward-biased p-n tunnel junctions; high channel-doping concentration; negative drain bias region; negative-differential transconductance characteristics; p-type body degeneracy; peak-to-valley ratio; room temperature; self-aligned SOI MOSFET; source-drain; square-channel SOI nMOSFETs; Fabrication; MOSFET circuits; Scanning electron microscopy; Silicon on insulator technology; Substrates; Switches; Temperature; Transconductance; Tunneling; Wire;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2002.803769
Filename :
1039184
Link To Document :
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