• DocumentCode
    834446
  • Title

    Negative-differential transconductance characteristics at room temperature in 30-nm square-channel SOI nMOSFETs with a degenerately doped body

  • Author

    Kim, Kyung Rok ; Kim, Dae Hwan ; Sung, Suk-Kang ; Lee, Jong Duk ; Park, Byung-Gook

  • Author_Institution
    Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
  • Volume
    23
  • Issue
    10
  • fYear
    2002
  • Firstpage
    612
  • Lastpage
    614
  • Abstract
    Negative-differential transconductance characteristics at room temperature with a peak-to-valley ratio of about two were observed in 30-nm square-channel silicon-on-insulator nMOSFETs with degenerately doped bodies. High channel-doping concentration creates the degeneracy in the p-type body of the self-aligned SOI MOSFET and consequently, enables band-to-band tunneling between degenerate body and source-drain. I/sub DS/-V/sub DS/ curves in the negative drain bias region also show band-to-band tunneling current as in the case of forward-biased p-n tunnel junctions.
  • Keywords
    MOSFET; degenerate semiconductors; doping profiles; electric admittance; heavily doped semiconductors; p-n junctions; silicon-on-insulator; tunnelling; 30 nm; SIMS analysis; Si-SiO/sub 2/; Si:B-Si:As; band-to-band tunneling; degenerately doped body; forward-biased p-n tunnel junctions; high channel-doping concentration; negative drain bias region; negative-differential transconductance characteristics; p-type body degeneracy; peak-to-valley ratio; room temperature; self-aligned SOI MOSFET; source-drain; square-channel SOI nMOSFETs; Fabrication; MOSFET circuits; Scanning electron microscopy; Silicon on insulator technology; Substrates; Switches; Temperature; Transconductance; Tunneling; Wire;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2002.803769
  • Filename
    1039184