Title :
VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excited by Piezoelectric Transformer in He–Xe Mixture
Author :
Teranishi, Kenji ; Inada, Daisuke ; Shimomura, Naoyuki ; Suzuki, Susumu ; Itoh, Haruo
Author_Institution :
Inst. of Technol. & Sci., Univ. of Tokushima, Tokushima
Abstract :
A new type of compact excimer lamp has been developed using a piezoelectric transformer (PT) which employs the excitation of dielectric barrier discharge (DBD) in a He-Xe (10.8%) mixture. To investigate the vacuum ultraviolet emission characteristics, a spectroscopic measurement is performed for the He-Xe DBD generated by the PT. The emission peak is observed at 172 nm in a high gas-pressure region, and a sharp peak is observed at 147 nm in a low-pressure region. These are derived from the radiation from the Xe2* excimers and the resonance line of the xenon atoms, respectively.
Keywords :
discharges (electric); excimers; gas mixtures; helium; piezoelectricity; plasma diagnostics; transformers; ultraviolet spectra; xenon; He-Xe; He-Xe mixture; VUV spectroscopy; compact excimer lamp; dielectric barrier discharge; piezoelectric transformer; vacuum ultraviolet emission; xenon excimers; xenon resonance line; Character generation; Dielectric measurements; Electrochemical impedance spectroscopy; Electrodes; Fault location; Inductors; Lamps; Performance evaluation; Plasma sources; Voltage; Dielectric barrier discharge (DBD); excimer lamp; piezoelectric transformer (PT); vacuum ultraviolet (VUV);
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.927342
