Title :
Effects of External Magnetic Field on the Characteristics of Electron Cyclotron Resonance Discharge
Author :
Jin, Xiaolin ; Huang, Tao ; Yang, Zhonghai
Author_Institution :
Sch. of Phys. Electron., Univ. of Electron. Sci. & Technol. of China, Chengdu
Abstract :
The effects of external magnetic field on the characteristics of electron cyclotron resonance (ECR) discharge are investigated by means of simulation. The quasi-3-D particle-in-cell plus Monte Carlo collision (PIC/MCC) method is presented. Secondary electron emission model is applied to describe the interaction between electron and boundary, which is simulated by the Monte Carlo collision (MCC) approach. The spatiotemporal evolution of electron space distributions is shown. Electron density and temperature at the initial stage and steady state of ECR discharge with the different external magnetic field configurations are discussed.
Keywords :
Monte Carlo methods; high-frequency discharges; magnetic field effects; magnetic mirrors; plasma density; plasma radiofrequency heating; plasma simulation; plasma sources; plasma temperature; secondary electron emission; ECR heating; ECR microwave discharge plasma devices; ECR plasma source; Monte Carlo collision method; electron cyclotron resonance discharge; electron density; electron space distributions; electron temperature; external magnetic field effects; mirror-type magnetic configuration; plasma simulation; quasithree-D particle-in-cell method; secondary electron emission model; spatiotemporal evolution; Cyclotrons; Electrons; Magnetic fields; Magnetic resonance; Monte Carlo methods; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Plasma temperature; ECR plasma; Electron cyclotron resonance (ECR) discharge; Monte Carlo collision (MCC); ionization; particle-in-cell (PIC);
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.2000958
