Fabrication of Mo/Cu multilayer and bilayer transition edge sensors

Author

Ali, Z.A. ; Drury, O.B. ; Cunningham, M.F. ; Chesser, J.M. ; Barbee, T.W., Jr. ; Friedrich, S.

Author_Institution

Lawrence Livermore Nat. Lab., CA, USA

Volume

15

Issue

2

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

526

Lastpage

529

Abstract

We are developing cryogenic high-resolution X-ray, Gamma-ray and neutron spectrometers based on superconducting Mo/Cu transition edge sensors. Here we discuss the sensor design for different applications, present the photolithographic fabrication techniques, and outline future detector development to increase the spectrometer sensitivity.

Keywords

X-ray spectrometers; copper; gamma-ray spectrometers; molybdenum; multilayers; neutron spectrometers; photolithography; superconducting particle detectors; superconducting thin films; Mo-Cu; bilayer transition edge sensors; cryogenic high-resolution X-ray spectrometers; cryogenic high-resolution gamma-ray spectrometers; cryogenic high-resolution neutron spectrometers; device fabrication; multilayers; photolithographic fabrication techniques; superconducting transition edge sensors; Energy resolution; Fabrication; Gamma ray detectors; Neutrons; Nonhomogeneous media; Spectroscopy; Superconducting materials; Superconducting photodetectors; Temperature sensors; Thermal conductivity; Device fabrication; Mo/Cu multilayers; gamma-ray spectrometers; superconducting transition edge sensors; x-ray spectrometers;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2005.849897

Filename

1439690