Title :
Micromachined gas flow regulator for ion propulsion systems
Author :
Bruschi, P. ; Diligenti, A. ; Piotto, M.
Author_Institution :
Dipt. di Ingegneria dell´´Informazione, Elettronica, Informatica, Telecomunicazioni, Pisa Univ., Italy
fDate :
7/1/2002 12:00:00 AM
Abstract :
A gas flow regulator for ion propulsion systems on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a borosilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions of the device is described. The gas mass flow dependence on both the inlet pressure and the absolute temperature is measured and discussed.
Keywords :
aerospace propulsion; artificial satellites; flow control; microfluidics; micromachining; Si; absolute temperature; anodic bonding; borosilicate glass cover; fabrication process; gas mass flow dependence; inlet pressure; ion propulsion systems; micromachined gas flow regulator; small satellites; Bonding; Fabrication; Fluid flow; Glass; Micromachining; Propulsion; Regulators; Satellites; Silicon; Temperature measurement;
Journal_Title :
Aerospace and Electronic Systems, IEEE Transactions on
DOI :
10.1109/TAES.2002.1039414
