DocumentCode
835192
Title
Micromachined gas flow regulator for ion propulsion systems
Author
Bruschi, P. ; Diligenti, A. ; Piotto, M.
Author_Institution
Dipt. di Ingegneria dell´´Informazione, Elettronica, Informatica, Telecomunicazioni, Pisa Univ., Italy
Volume
38
Issue
3
fYear
2002
fDate
7/1/2002 12:00:00 AM
Firstpage
982
Lastpage
988
Abstract
A gas flow regulator for ion propulsion systems on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a borosilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions of the device is described. The gas mass flow dependence on both the inlet pressure and the absolute temperature is measured and discussed.
Keywords
aerospace propulsion; artificial satellites; flow control; microfluidics; micromachining; Si; absolute temperature; anodic bonding; borosilicate glass cover; fabrication process; gas mass flow dependence; inlet pressure; ion propulsion systems; micromachined gas flow regulator; small satellites; Bonding; Fabrication; Fluid flow; Glass; Micromachining; Propulsion; Regulators; Satellites; Silicon; Temperature measurement;
fLanguage
English
Journal_Title
Aerospace and Electronic Systems, IEEE Transactions on
Publisher
ieee
ISSN
0018-9251
Type
jour
DOI
10.1109/TAES.2002.1039414
Filename
1039414
Link To Document