X-ray detection using superconducting tunnel junctions with polyimide insulation Layer

Author

Yoshida, Masayo ; Hoshino, Kouichi ; Taino, Tohru ; Myoren, Hiroaki ; Takada, Susumu ; Kikuchi, Katsuya ; Nakagawa, Hiroshi ; Aoyagi, Masahiro ; Sato, Hiromi ; Shimizu, Hirohiko M.

Author_Institution

Dept. of Eng., Saitama Univ., Japan

Volume

15

Issue

2

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

606

Lastpage

608

Abstract

We have fabricated Nb-based superconducting tunnel junctions (STJs) with Al trapping layers using the photosensitive polyimide insulation layer for X-ray detector. It is possible to simplify the fabrication process of the STJs, because the photosensitive polyimide is used as the insulation layer instead of conventional inorganic insulation films without an etching process in a vacuum chamber. The polyimide insulation layer expects to be stable for thermal cycling between 0.3 K and room temperature. The preliminary experiments of 5.9 keV radiation shows the energy resolution of 86 eV.

Keywords

X-ray detection; niobium; polymer films; superconducting junction devices; superconducting thin films; 5.9 keV; 86 eV; Al; Al trapping layers; Nb; Nb-based superconducting tunnel junctions; X-ray detection; X-ray detector; photosensitive polyimide insulation layer; Etching; Fabrication; Insulation; Josephson junctions; Polyimides; Superconducting epitaxial layers; Superconducting films; Temperature; X-ray detection; X-ray detectors; Buffer layer; X-ray detector; photosensitive polyimide; superconducting tunnel junction;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2005.849955

Filename

1439711