• DocumentCode
    83545
  • Title

    Monolithic Silicon Waveguides in Standard Silicon

  • Author

    Chia-Ming Chang ; Solgaard, Olav

  • Volume
    33
  • Issue
    1
  • fYear
    2013
  • fDate
    Jan.-Feb. 2013
  • Firstpage
    32
  • Lastpage
    40
  • Abstract
    A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
  • Keywords
    elemental semiconductors; silicon-on-insulator; waveguides; SOI channel waveguides; SOI wafers; Si; low-loss silicon waveguides; monolithic silicon waveguides; silicon-on-insulator wafers; silicon-photonic device fabrication; standard silicon wafers; Annealing; Optical interconnections; Optical waveguides; Photonic devices; Photonics; Silicon; Substrates; Waveguide components; integrated optics devices; optical interconnects; silicon photonics; waveguides;
  • fLanguage
    English
  • Journal_Title
    Micro, IEEE
  • Publisher
    ieee
  • ISSN
    0272-1732
  • Type

    jour

  • DOI
    10.1109/MM.2012.93
  • Filename
    6374191
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=83545