DocumentCode
835958
Title
Application of weakly ionized plasmas for materials sampling and analysis
Author
Blades, Michael W. ; Banks, Peter ; Gill, Chris ; Huang, Degui ; Leblanc, C. ; Liang, Dong
Author_Institution
Dept. of Chem., British Columbia Univ., Vancouver, BC, Canada
Volume
19
Issue
6
fYear
1991
fDate
12/1/1991 12:00:00 AM
Firstpage
1090
Lastpage
1113
Abstract
The use of weakly ionized plasmas as spectroscopic sources for materials sampling and analysis is reviewed. Plasma sources currently used for this purpose include direct-current and alternating-current plasmas, inductively coupled plasmas, microwave-induced plasmas, surface-wave plasmas, capacitively coupled plasmas, capacitive microwave plasmas, glow discharges, flowing afterglows, theta pinch discharges, exploding films and wires, and laser-produced plasmas. The authors give a summary of relevant characteristics of some of the plasma sources. Included are the source, common method of application, approximate detection limit for that method, applicability for solid sampling, susceptibility to matrix effects, approximate cost, and the most common usage for the method
Keywords
afterglows; exploding wires and foils; glow discharges; pinch effect; plasma production; plasma production and heating by laser beam; reviews; spectrochemical analysis; alternating-current plasmas; application; capacitive microwave plasmas; capacitively coupled plasmas; detection limit; direct-current plasmas; exploding films and wires; flowing afterglows; glow discharges; inductively coupled plasmas; laser-produced plasmas; materials analysis; materials sampling; matrix effects; microwave-induced plasmas; solid sampling; spectroscopic sources; surface-wave plasmas; theta pinch discharges; weakly ionized plasmas; Optical coupling; Optical materials; Plasma applications; Plasma materials processing; Plasma properties; Plasma sources; Sampling methods; Spectroscopy; Surface discharges; Surface emitting lasers;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.125033
Filename
125033
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