• DocumentCode
    835958
  • Title

    Application of weakly ionized plasmas for materials sampling and analysis

  • Author

    Blades, Michael W. ; Banks, Peter ; Gill, Chris ; Huang, Degui ; Leblanc, C. ; Liang, Dong

  • Author_Institution
    Dept. of Chem., British Columbia Univ., Vancouver, BC, Canada
  • Volume
    19
  • Issue
    6
  • fYear
    1991
  • fDate
    12/1/1991 12:00:00 AM
  • Firstpage
    1090
  • Lastpage
    1113
  • Abstract
    The use of weakly ionized plasmas as spectroscopic sources for materials sampling and analysis is reviewed. Plasma sources currently used for this purpose include direct-current and alternating-current plasmas, inductively coupled plasmas, microwave-induced plasmas, surface-wave plasmas, capacitively coupled plasmas, capacitive microwave plasmas, glow discharges, flowing afterglows, theta pinch discharges, exploding films and wires, and laser-produced plasmas. The authors give a summary of relevant characteristics of some of the plasma sources. Included are the source, common method of application, approximate detection limit for that method, applicability for solid sampling, susceptibility to matrix effects, approximate cost, and the most common usage for the method
  • Keywords
    afterglows; exploding wires and foils; glow discharges; pinch effect; plasma production; plasma production and heating by laser beam; reviews; spectrochemical analysis; alternating-current plasmas; application; capacitive microwave plasmas; capacitively coupled plasmas; detection limit; direct-current plasmas; exploding films and wires; flowing afterglows; glow discharges; inductively coupled plasmas; laser-produced plasmas; materials analysis; materials sampling; matrix effects; microwave-induced plasmas; solid sampling; spectroscopic sources; surface-wave plasmas; theta pinch discharges; weakly ionized plasmas; Optical coupling; Optical materials; Plasma applications; Plasma materials processing; Plasma properties; Plasma sources; Sampling methods; Spectroscopy; Surface discharges; Surface emitting lasers;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.125033
  • Filename
    125033