Highly-selective electronically-tunable cryogenic filters using monolithic, discretely-switchable MEMS capacitor arrays

Author

Prophet, Eric M. ; Musolf, Jürgen ; Zuck, Betty F. ; Jimenez, Silverio ; Kihlstrom, Kenneth E. ; Willemsen, Balam A.

Author_Institution

Supercond. Technol. Inc., Santa Barbara, CA, USA

Volume

15

Issue

2

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

956

Lastpage

959

Abstract

A low loss electronically tunable filter was demonstrated using HTS/Au MEMS switched capacitor arrays. The two-pole filter was tuned by simultaneously varying the capacitance of each resonator by equal amounts. A K factor of between 3,500 and 5,000 was demonstrated for single pole resonators. The total tuning range was about 25% with an average Q of 7,000 at 77 K.

Keywords

active filters; circuit tuning; cryogenic electronics; gold; high-temperature superconductors; microswitches; superconducting filters; switched capacitor networks; switching circuits; 77 K; Au; HTS; MEMS capacitor arrays; cryogenic electronics; cryogenic filters; electronically tunable filter; switchable capacitor arrays; two-pole filter; Capacitors; Cryogenics; Electrodes; Gold; High temperature superconductors; Micromechanical devices; Radio frequency; Resonator filters; Switches; Tunable circuits and devices; Cryogenic electronics; filters; microelectromechanical devices; tunable circuits and devices;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2005.850136

Filename

1439798