Title :
Micromachined 2D nanoelectrospray emitter [mass spectrometer applications]
Author :
Arscott, S. ; Le Gac, S. ; Druon, C. ; Tabourier, P. ; Rolando, C.
Author_Institution :
Inst. d´´Electronique, Villeneuve d´´Ascq, France
Abstract :
A novel 2D nanoelectrospray emitter for mass spectrometry has been micromachined using photoresist SU-8 on silicon substrates using one-step photomasking. The design contains a reservoir, a capillary slot and an emitter tip. The emitters were successfully tested on an ion trap mass spectrometer. A nanoelectrospray was observed at voltages as low as 0.8 kV.
Keywords :
mass spectrometer accessories; microfluidics; micromachining; particle traps; 0.8 kV; ESI; SU-8 photoresist; Si; capillary slot; electrospray ionisation; emitter tip; ion trap mass spectrometer; mass spectrometry; microfluidics; micromachined 2D nanoelectrospray emitter; nanoelectrospray operating voltage; one-step photomasking; reservoir;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20031099
