Author_Institution :
Dept. of Electr. Eng., McGill Univ., Montreal, Que., Canada
Abstract :
Recent theoretical studies and experiments have been shown that interdigital transducers can couple strongly to plate modes in piezoelectric materials and in piezoelectric-on-nonpiezoelectric composite membranes. The calculated velocity dispersion and electromechanical coupling factors for plate modes in representative piezoelectric materials are described. The frequency dependence of velocity and electromechanical coupling factors are given, under different metallization conditions, for generalized stiffened-Lamb, pure stiffened-Lamb, and stiffened-shear (shear-horizontal) modes, for various plate orientations in lithium niobate, lithium tantalate, quartz, bismuth germanium oxide, and zinc oxide. For lithium niobate, electromechanical-coupling values as high as 15% are found under narrowband bandpass conditions, and 5% under wideband low-pass conditions. For lithium tantalate, bismuth germanium oxide, coupling values of 0.5, 2, and 4% are obtained. For quartz with its weaker piezoelectricity, the coupling is still made smaller.<>
Keywords :
piezoelectricity; surface acoustic waves; Bi/sub 12/GeO/sub 20/; Lamb modes; LiNbO/sub 3/; LiTaO/sub 3/; SAW; ZnO; electromechanical coupling factors; interdigital transducers; metallization; piezoelectric plates; plate modes; shear-horizontal modes; velocity; velocity dispersion; Biomembranes; Bismuth; Frequency dependence; Germanium; Lithium compounds; Lithium niobate; Metallization; Piezoelectric materials; Piezoelectric transducers; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on