DocumentCode :
839802
Title :
Superconducting micro-bearings
Author :
Coombs, T.A. ; Samad, I. ; Ruiz-Alonso, D. ; Tadinada, K.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
Volume :
15
Issue :
2
fYear :
2005
fDate :
6/1/2005 12:00:00 AM
Firstpage :
2312
Lastpage :
2315
Abstract :
This paper presents research into superconducting Micro-Bearings for MEMS systems. Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-engineered moving mechanical systems. These devices commonly known as Micro-ElectroMechanical Systems (MEMS) have many potential advantages. In many respects the effect of scaling a machine from macro-sized to micro-sized are either neutral or beneficial. However in one important respect the scaling produces a severely detrimental effect. That respect is in the tribology and the subsequent wear on the high speed rotating machines. This leads to very short device lifetimes. This paper presents results obtained from a MEMS motor supported on superconducting bearings. The bearings are self-positioning, relying on, the Meissner effect to provide a levitation force which moves the rotor into position and flux pinning to provide stability thereafter. The rotor is driven by a simple electrostatic type motor in which photo resist is used to pattern the motor poles directly onto the rotor.
Keywords :
Meissner effect; flux pinning; magnetic bearings; micromechanical devices; micromotors; photoresists; rotors; superconducting devices; MEMS systems; Meissner effect; VLSI; microelectromechanical systems; photo resist; rotor; silicon processing; superconducting microbearings; very large scale integration; Machinery production industries; Mechanical systems; Microelectromechanical systems; Micromechanical devices; Production systems; Rotating machines; Rotors; Silicon; Tribology; Very large scale integration; Bearings; MEMS; VLSI; micro-machining;
fLanguage :
English
Journal_Title :
Applied Superconductivity, IEEE Transactions on
Publisher :
ieee
ISSN :
1051-8223
Type :
jour
DOI :
10.1109/TASC.2005.849640
Filename :
1440128
Link To Document :
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