Title :
Magnetic micro-actuators and systems (MAGMAS)
Author :
Cugat, Orphée ; Delamare, Jérôme ; Reyne, Gilbert
Author_Institution :
French Centre Nat. de la Recherche Scientifique CNRS, Grenoble, France
Abstract :
Magnetic interactions provide outstanding performances for powerful integrated micro-actuators. This paper explains how magnetic interactions involving permanent magnets, currents, and various magnetic materials remain very effective and even improve as dimensions are reduced. The technological problems that have slowed the development of magnetic micro-actuators and systems (MAGMAS) are progressively being solved. As long as materials scientists continue to develop better thick-film patterned permanent magnets compatible with microsystem technologies, MAGMAS will have a promising future.
Keywords :
electromagnetic actuators; electromagnetic forces; magnetic thin films; microactuators; permanent magnet machines; MAGMAS; MEMS; electromagnetic forces; integrated magnetic microactuators; magnetic interactions; magnetic materials; magnetic microsystems; microgenerators; microsystem technologies; patterned permanent-magnet thick films; scale reduction laws; Conductors; Electrostatics; Magnetic analysis; Magnetic materials; Magnetostriction; Microactuators; Microelectronics; Micromagnetics; Micromechanical devices; Permanent magnets;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2003.816763