• DocumentCode
    840778
  • Title

    IEEE Transactions on Semiconductor Manufacturing Information for authors

  • Volume
    20
  • Issue
    2
  • fYear
    2007
  • fDate
    5/1/2007 12:00:00 AM
  • Abstract
    Provides instructions and guidelines to prospective authors who wish to submit manuscripts.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2007.898424
  • Filename
    4182423