DocumentCode
841188
Title
An acoustic micrometer and its application to layer thickness measurements
Author
Tsukahara, Yusuke ; Nakaso, Noritaka ; Kushibiki, Jun-ichi ; Chubachi, Noriyoshi
Author_Institution
Toppan Printing Co. Ltd., Saitama, Japan
Volume
36
Issue
3
fYear
1989
fDate
5/1/1989 12:00:00 AM
Firstpage
326
Lastpage
331
Abstract
The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present study. The measurable range of the thickness for gold layers covered from 1 to 20 mu m when a frequency range of 10-200 MHz was used. Stability and accuracy were achieved to within +or-0.2% and +or-1%, respectively.<>
Keywords
micrometry; thickness measurement; ultrasonic equipment; ultrasonic measurement; 1 to 20 micron; 10 to 200 MHz; Ni-Fe alloy; acoustic micrometer; layer thickness measurements; ultrasonic equipment; Acoustic applications; Acoustic measurements; Acoustic propagation; Frequency; Production; Spatial resolution; Stability; Surface acoustic waves; Thickness measurement; Ultrasonic variables measurement;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.19171
Filename
19171
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