Thin-film characterization using a scanning laser acoustic microscope with surface acoustic waves

Author

Robbins, William P. ; Mueller, Rolf K. ; Rudd, Eric

Author_Institution

Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA

Volume

35

Issue

4

fYear

1988

fDate

7/1/1988 12:00:00 AM

Firstpage

477

Lastpage

483

Abstract

The use of surface acoustic waves in a scanning laser acoustic microscope for the characterization of the mechanical or acoustic properties of thin films deposited on piezoelectric substrates is demonstrated. Quantitative measurements of mass loading effects of 5000-AA-thick tungsten films deposited on lithium niobate substrates were obtained using 100-MHz surface acoustic waves. No information about the tungsten film could be obtained using 100-MHz compressional waves. Methods of generating surface waves on nonpiezoelectric materials so that this technique could be used on arbitrary substrates are discussed.<>

Keywords

acoustic microscopy; laser beam applications; photoacoustic effect; surface acoustic waves; 100 MHz; 500 nm; LiNbO/sub 3/; W; compressional waves; mass loading; piezoelectric substrates; scanning laser acoustic microscope; surface acoustic waves; thin films; Acoustic waves; Mechanical factors; Microscopy; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Surface emitting lasers; Transistors; Tungsten;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.4185

Filename

4185