Title :
Measurement method of pn junction depth using light spectrum response
Author_Institution :
Microelectronics Center, Southeast Univ., Nanjing, China
Abstract :
Using a one-dimensional photodiode simulator, the light spectrum response of a pn junction structure is analysed and a monotonic relationship of the wavelength of the peak response against pn junction depth is derived. Based on this, an optical measurement method for pn junction depth is presented. Some experimental results support the validity of the presented method.
Keywords :
p-n homojunctions; photodiodes; spatial variables measurement; experimental results; light spectrum response; one-dimensional photodiode simulator; optical measurement method; peak response wavelength; pn junction depth measurement; pn junction structure;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19911358
