Design, Fabrication, and Assembly of an Optical Biosensor Probe Package for OCT (Optical Coherence Tomography) Application

Author

Premachandran, C.S. ; Khairyanto, Ahmad ; Sheng, Kelvin Chen Wei ; Singh, Janak ; Teo, Jason ; Yingshun, Xu ; Nanguang, Chen ; Sheppard, Colin ; Olivo, Malini

Author_Institution

A*STAR Inst. of Microelectron., Singapore

Volume

32

Issue

2

fYear

2009

fDate

5/1/2009 12:00:00 AM

Firstpage

417

Lastpage

422

Abstract

A miniaturized optical bioprobe package is developed using a 3-D micromirror and is tested for bio-imaging application. A silicon optical bench is designed and micromachined to assemble the fiber, lens, and the 3-D micromirror device. A 45^deg angle trench is used to place the micromirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micromirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micromirror. The bioprobe is packaged and is tested in a time domain optical coherence tomography (OCT) setup and optical image is obtained for plant tissue.

Keywords

biomedical imaging; biosensors; gradient index optics; lenses; micromirrors; optical tomography; 3D micromirror; GRIN lens; OCT; bioimaging application; numerical aperture; optical bioprobe package; optical biosensor probe package; optical coherence tomography; 3-D MEMS; Biosensor; MEMS packaging; micro-electro-mechanical system (MEMS); micromirror; optical coherence tomography (OCT); optical probe; silicon optical bench (SiOB);

fLanguage

English

Journal_Title

Advanced Packaging, IEEE Transactions on

Publisher

ieee

ISSN

1521-3323

Type

jour

DOI

10.1109/TADVP.2009.2013658

Filename

4912433