Title :
On-Chip Electrical Breakdown of Metallic Nanotubes for Mass Fabrication of Carbon-Nanotube-Based Electronic Devices
Author :
Buh, Gyoung-Ho ; Hwang, Jea-Ho ; Jeon, Eun-Kyoung ; So, Hye-Mi ; Lee, Jeong-O ; Kong, Ki-Jeong ; Chang, Hyunju
Author_Institution :
Korea Res. Inst. of Chem. Technol., Daejeon
Abstract :
A mass fabrication scheme for carbon-nanotube (CNT)-based electronic devices is developed by combining the semiconductor wafer electrical sorting with selective burning of metallic CNT wires. By applying a millisecond electrical pulse to CNTs with the optimized logical scheme of voltage stress, we successfully removed the metallic CNTs but not the high-performance semiconductor CNTs. The fabrication scheme implemented with a probe card achieved a 100 % gross yield of CNT-based sensors with a short process time.
Keywords :
carbon nanotubes; electric sensing devices; field effect transistors; mass production; nanoelectronics; nanotube devices; nanowires; semiconductor device breakdown; system-on-chip; CNT-based sensors; CNTFET; carbon-nanotube-based electronic devices; mass fabrication scheme; metallic nanotubes wires; millisecond electrical pulse; nanomanufacturing; nanotechnology; on-chip electrical breakdown; optimized logical scheme; probe card; process time; selective burning; semiconductor wafer electrical sorting; voltage stress; Carbon nanotube; nano manufacturing; nanotechnology; sensor;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2008.2004624
