Title :
Distinguished Lecturers Program
Author_Institution :
Business Team Leader, Accelerometers, Colibrys SA, Maladiére 83, 2000 Neuchâtel, Switzerland.
Abstract :
One of the general trends of the MEMS sensors business is the utilization of the technology to satisfy harsh environment requirements (temperature, shock, vibration, environment security). The conjunction of material (standard Silicon, SiC or SOI), with complex micromachining techniques and advanced assembly techniques are the key to provide robust sensors with a miniimum concession on specification. The goal of this paper is to present progress on gun hard (> 20,000 g) and wide temperature range MEMS accelerometers (-120°C to +180°C). Concrete solutions and results (out of more than 500 tested products)) will be presented and discussed in detail.
Keywords :
UHF antennas; UHF detectors; indoor communication; microwave detectors; ultra wideband communication; 0.1 to 3 GHz; GPR; UWB communication; UWB sensing; controlling software; indoor communication; intrusion sensor; multitask sensing; processing software; subsurface radar; telecommunication applications; through-wall seeing scanner; Accelerometers; Assembly; Electric shock; Micromachining; Micromechanical devices; Robustness; Security; Silicon carbide; Temperature distribution; Temperature sensors;
Journal_Title :
Aerospace and Electronic Systems Magazine, IEEE
DOI :
10.1109/MAES.2006.1599140
