Distinguished Lecturers Program

One of the general trends of the MEMS sensors business is the utilization of the technology to satisfy harsh environment requirements (temperature, shock, vibration, environment security). The conjunction of material (standard Silicon, SiC or SOI), with complex micromachining techniques and advanced assembly techniques are the key to provide robust sensors with a miniimum concession on specification. The goal of this paper is to present progress on gun hard (> 20,000 g) and wide temperature range MEMS accelerometers (-120°C to +180°C). Concrete solutions and results (out of more than 500 tested products)) will be presented and discussed in detail.