Title :
Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system
Author :
Kadota, Mitsuhiro ; Kasanami, T. ; Minakata, M.
Author_Institution :
Murata Manufacturing Co. Ltd., Kyoto, Japan
Abstract :
Piezoelectric ZnO films on a glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on a ZnO/IDT/glass structure was possible at lambda =2.4 mu m.
Keywords :
piezoelectric thin films; sputter deposition; surface acoustic wave filters; zinc compounds; 1.1 GHz; 2.4 micron; RF mode electron cyclotron resonance sputtering; Rayleigh SAW; SAW filter; ZnO/IDT/glass structure; fundamental mode; glass substrate; piezoelectric ZnO films; smooth sidewall structure;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19921490
