DocumentCode
842662
Title
Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system
Author
Kadota, Mitsuhiro ; Kasanami, T. ; Minakata, M.
Author_Institution
Murata Manufacturing Co. Ltd., Kyoto, Japan
Volume
28
Issue
25
fYear
1992
Firstpage
2315
Lastpage
2317
Abstract
Piezoelectric ZnO films on a glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on a ZnO/IDT/glass structure was possible at lambda =2.4 mu m.
Keywords
piezoelectric thin films; sputter deposition; surface acoustic wave filters; zinc compounds; 1.1 GHz; 2.4 micron; RF mode electron cyclotron resonance sputtering; Rayleigh SAW; SAW filter; ZnO/IDT/glass structure; fundamental mode; glass substrate; piezoelectric ZnO films; smooth sidewall structure;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19921490
Filename
191848
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