Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors

Author

Choo, Hyuck ; Muller, Richard S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA

Volume

15

Issue

6

fYear

2006

Firstpage

1555

Lastpage

1567

Abstract

In this paper, we have demonstrated an addressable array (5-by-5) of high-quality microlenses suitable for application in a Shack-Hartmann (SH) sensor in a microoptical system. Specific lenses in the array can be addressed using a new selection scheme (that we have designed, built, and tested) in which the mechanical resonant frequencies of individual lens-support carriages are varied. Thus, by changing the frequency of the drive voltage, we require only two electrical connections per row in the lens system to identify the selected lens by its resonating focal image. We show that using this lens-identification method will allow us to improve the dynamic range of SH sensors by a factor of 12-46 above values reported for conventional SH designs

Keywords

micro-optomechanical devices; microlenses; microsensors; optical arrays; wavefront sensors; MEMS; Shack-Hartmann sensors; dynamic range; frequency addressing; high-quality microlenses; lens-identification; microlens array; microoptical system; optical microelectromechanical systems; resonating focal image; Dynamic range; Lenses; Mechanical sensors; Microoptics; Optical design; Resonant frequency; Sensor arrays; Sensor systems and applications; Testing; Voltage; Dynamic range; Shack–Hartmann (SH) sensor; frequency addressing; microlens; optical microelectromechanical systems (MEMS);

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.886011

Filename

4020257