DocumentCode
843121
Title
A High- 
Widely Tunable Gigahertz Electromagnetic Cavity Resonator
Author
Hou, Stephen M. ; Lang, Jeffrey H. ; Slocum, Alexander H. ; Weber, Alexis C. ; White, James R.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA
Volume
15
Issue
6
fYear
2006
Firstpage
1540
Lastpage
1545
Abstract
This paper describes the design, fabrication and testing of a quasi-static electromagnetic cavity resonator fabricated using potassium-hydroxide (KOH) etching, shallow reactive-ion etching (RIE), metalization and wafer bonding. The resonator is distinguished by its simultaneous high-Q near 200, and wide high-frequency tuning range, 2.5-4.0 GHz for the experimental resonator presented here. When combined with an integrated actuator, it should be suitable for use in electronically tunable radio-frequency (RF) bandpass filters and oscillators. The experimental resonator, however, is tuned with an external piezoelectric actuator for simplicity
Keywords
band-pass filters; cavity resonators; electromagnetic devices; metallisation; micromechanical devices; piezoelectric actuators; potassium compounds; radiofrequency oscillators; sputter etching; wafer bonding; 2.5 to 4.0 GHz; KOH; high-Q electromagnetic cavity resonator; metallization; oscillators; piezoelectric actuator; quasistatic electromagnetic cavity resonator; radiofrequency bandpass filters; reactive-ion etching; wafer bonding; widely tunable electromagnetic cavity resonator; Actuators; Band pass filters; Cavity resonators; Etching; Fabrication; Oscillators; Radio frequency; Testing; Tuning; Wafer bonding; Capacitor; gigahertz; high frequency; inductor; potassium-hydroxide (KOH); resonator; tunable;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2006.879709
Filename
4020267
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