DocumentCode :
843390
Title :
Angular Effects in the Sputtering of Stainless Steel by Hydrogen Ions
Author :
Smith, Joe N., Jr.
Author_Institution :
General Atomic Company San Diego, California 92138
Volume :
26
Issue :
1
fYear :
1979
Firstpage :
1292
Lastpage :
1295
Abstract :
One major source of plasma contamination in tokamaks results from sputtering of the first wall of the plasma chamber by hydrogenic species. Charge transfer neutrals and escaping ions will have different incident angle distributions and it is therefore important to study the angular behavior of the sputtering mechanism. Laboratory experiments are reported in which the angular and energy distribution of Cr+ sputtered from 304 stainless steel by H+3 is measured as a function of angle of incidence of the H+3 beam. A change in both the angular distribution and the energy distribution is observed toward grazing incidence, which is taken as evidence of the increasing contribution of surface recoils. The effects of surface contamination on the yield, angular distribution, and energy distribution of sputtered ions are also reported.
Keywords :
Charge transfer; Energy measurement; Hydrogen; Laboratories; Plasma sources; Pollution measurement; Sputtering; Steel; Surface contamination; Tokamaks;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1979.4330371
Filename :
4330371
Link To Document :
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