Title :
An RF-MEMS Switch With Low-Actuation Voltage and High Reliability
Author :
Lee, Seong-Dae ; Jun, Byoung-Chul ; Kim, Sam-Dong ; Park, Hyun-Chang ; Rhee, Jin-Koo ; Mizuno, Koji
Author_Institution :
Millimeter-Wave Innovation Technol. Res. Center, Dongguk Univ., Seoul
Abstract :
"Both the authors and the Editor-in-Chief of Volume 15, number 6 of the IEEE/ASME JMEMS (December 2006, pp.1606-1611) of the paper numbered JMEMS 1743 have agreed that this paper, "An RF MEMS Switch with Low Actuation Voltage and High Reliability," should not have been published. The paper would have been withdrawn had this fact been discovered before the IEEE/ASME JMEMS print date for December 2006. The authors have indicated that they will work to provide a new version their paper that will be considered for publication if it is submitted in the future. For help in coming to this decision, I would like to thank those concerned individuals, including the authors, JMEMS editors, and highly respected researchers in the MEMS and microwave communities who contributed their time and consideration to help us assure the integrity of our journal." Richard S. Muller, Editor-in-Chief, IEEE/ASME JMEMS
Keywords :
elastic deformation; electrostatic actuators; microswitches; microwave switches; 0.5 dB; 0.59 dB; 120 ns; 130 ns; 4.5 V; 50 GHz; RF-MEMS switch; actuation energy; bridge contact pad structures; cold switching; elastic deformation; electrostatic actuation; electrostatically actuated suspended beam; freely moving contact pad; guard poles; radiofrequency microelectromechanical systems switch; Contacts; Electrodes; Insertion loss; Microelectromechanical systems; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Voltage; Freely moving; long-term lifetime; low-actuation voltage; microelectromechanical system (MEMS) switch; movable lower contact pad;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.886394