The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Static friction between sidewall contact surfaces of polycrystalline silicon micromachines was investigated under different contact pressures, vacuum conditions, relative humidity levels, and temperatures. The static coefficient of friction exhibited a nonlinear dependence on the external contact pressure. A difference between in-contact and pull-out adhesion forces was observed due to the elastic recovery of the deformed asperities at the contact interface. The true static coefficient of friction was determined by considering the effects of the dominant adhesion forces (i.e., van der Waals and capillary forces) on the normal force applied at the sidewall contact interface. The roles of van der Waals and capillary forces in the sidewall friction behavior were analyzed in light of results for the interfacial shear strength and the adhesion force. The major benefits of the present friction micromachine and the developed experimental scheme are discussed in the context of static coefficient of friction and adhesion force results obtained under different environmental and loading conditions