DocumentCode
843488
Title
The Range of 120 keV Ions in Solids
Author
Santry, D.C. ; Werner, R.D. ; Westcott, O.M.
Author_Institution
Atomic Energy of Canada Limited, Chalk River, Ontario, Canada KOJ 1JO
Volume
26
Issue
1
fYear
1979
Firstpage
1331
Lastpage
1334
Abstract
A variety of heavy ions covering the mass range 24Mg to 209Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, A1 and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.
Keywords
Apertures; Backscatter; Detectors; Energy resolution; Helium; Implants; Rough surfaces; Solid state circuits; Surface roughness; Surface topography;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1979.4330381
Filename
4330381
Link To Document