Title :
A Digitally Controlled Scanning Microprobe for Trace Element Analysis
Author :
Suter, M. ; Bonani, G. ; Jung, H. ; Stoller, Ch. ; Wolfli, W.
Author_Institution :
Laboratorium fÿr Kernphysik, Swiss Federal Institute of Technology, 8093 Zÿrich, Switzerland
Abstract :
A microprobe facility has been installed at the ETH-EN Tandem accelerator which is capable of focusing protons and heavy ions with a mass-energy product P ¿ 70 amu MeV/q2 (q = charge state) to a spot size of 10-30 ¿m2. By means of a digitally controlled electrostatic system a proton beam of 3 MeV can be deflected in computer controlled patterns over a target area of 1.5×1.5 mm2. The system can be used either for highly sensitive trace element analysis or for deep implantation of heavy ions.
Keywords :
Apertures; Control systems; Digital control; Electrostatics; Ion accelerators; Ion beams; Laboratories; Lenses; Particle beams; Proton accelerators;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1979.4330389
