• DocumentCode
    843586
  • Title

    A Digitally Controlled Scanning Microprobe for Trace Element Analysis

  • Author

    Suter, M. ; Bonani, G. ; Jung, H. ; Stoller, Ch. ; Wolfli, W.

  • Author_Institution
    Laboratorium fÿr Kernphysik, Swiss Federal Institute of Technology, 8093 Zÿrich, Switzerland
  • Volume
    26
  • Issue
    1
  • fYear
    1979
  • Firstpage
    1373
  • Lastpage
    1377
  • Abstract
    A microprobe facility has been installed at the ETH-EN Tandem accelerator which is capable of focusing protons and heavy ions with a mass-energy product P ¿ 70 amu MeV/q2 (q = charge state) to a spot size of 10-30 ¿m2. By means of a digitally controlled electrostatic system a proton beam of 3 MeV can be deflected in computer controlled patterns over a target area of 1.5×1.5 mm2. The system can be used either for highly sensitive trace element analysis or for deep implantation of heavy ions.
  • Keywords
    Apertures; Control systems; Digital control; Electrostatics; Ion accelerators; Ion beams; Laboratories; Lenses; Particle beams; Proton accelerators;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1979.4330389
  • Filename
    4330389
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=843586