Large tilt angle electrostatic force actuated micro-mirror

Author

Kim, Tae-Sik ; Lee, Sang-Shin ; Yee, Youngjoo ; Bu, Jong-Uk ; Park, Chil-Geun ; Ha, Man-Hyo

Author_Institution

Devices & Mater. Lab, LG Electron. Inst. of Technol., Seoul, South Korea

Volume

14

Issue

11

fYear

2002

Firstpage

1569

Lastpage

1571

Abstract

A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.

Keywords

beam steering; electrostatic devices; integrated optics; micro-optics; mirrors; optical communication equipment; wavelength division multiplexing; 100 V; bottom electrode; built-in air gap; grounded mirror plate; large tilt angle electrostatic force actuated micro-mirror; measured tilt angles; micro-mirror; mirror rotation; optical beam steering; pull-in voltages; substrates; two-axis rotational micro-mirror; Capacitive sensors; Electrodes; Electrostatic actuators; Fasteners; Large-scale systems; Mirrors; Optical beams; Optical switches; Substrates; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2002.803913

Filename

1042005