A Highly Collimated Monochromatic Ion Probe System with an Energy Range of 0.5 to 50 KeV

All components of an interdependent system are complexly related. Ion source materials and performance, ion optics, magnetic optics, deceleration schemes and so forth are not easily treated as independent elements. The severe requirements of long term stability and fine optics must be watched by the realities of space charge, attrition, and simplistic items such as cost and practical operation. We trust we have demonstrated a mix of these odd parameters for good performance and long term stability