Influence of Surface State on Biochemical Sensing Using SiGe Nanowire

Author

Chiung-Hui Lai ; Kow-Ming Chang ; Yi-Ming Chen ; Chu-Feng Chen ; Po-Shen Kuo ; Tai-Yuan Chang ; Whang, Allen Jong-Woei ; Yi-Lung Lai ; Shiu-Yu Wang

Author_Institution

Dept. of Electron. Eng. & Inst. of Electron., Nat. Chiao-Tung Univ., Hsinchu, Taiwan

Volume

14

Issue

4

fYear

2015

fDate

Jun-15

Firstpage

334

Lastpage

338

Abstract

Nanowires are extensively used to fabricate highly sensitive electrical sensors for detection of biological and chemical species. The hole mobility can be promoted by the increasing Ge fraction in SiGe, achieved by the oxidation-induced Ge condensation. However, oxidation increases the number of surface states, which brings the nonnegligible contribution in mobility degradation. In this work, 3-aminopropyltrimethoxysilane (APTMS) was used as a biochemical reagent to modify the surface of SiGe nanowires, then bonding to bio-linker, bis (3-sulfo-N-hydroxysuccinimide ester) sodium salt (BS3). Various methods have been proposed for increasing sensitivity of boron-doped SiGe nanowires, such as capping layer, surface treatment, and annealing temperature.

Keywords

annealing; biochemistry; biosensors; electrochemical sensors; nanosensors; nanowires; oxidation; 3-aminopropyltrimethoxysilane; Ge fraction; SiGe:B; annealing temperature; biochemical reagent; biochemical sensing; biolinker; biological species; bis(3-sulfo-N-hydrox-ysuccinimide ester) sodium salt; boron-doped SiGe nanowires; capping layer; chemical species; electrical sensors; mobility degradation; oxidation-induced Ge condensa- tion; surface treatment; Nanobioscience; Oxidation; Plasmas; Sensitivity; Silicon; Silicon germanium; Surface treatment; Biosensors; SiGe nanowire; oxidation; sensitivity; surface state; surface treatment;

fLanguage

English

Journal_Title

NanoBioscience, IEEE Transactions on

Publisher

ieee

ISSN

1536-1241

Type

jour

DOI

10.1109/TNB.2015.2407912

Filename

7052347