DocumentCode
844341
Title
Pulsed Electron Beams for Annealing of Ion-Implanted Silicon
Author
Little, R.G. ; Greenwald, A.C. ; Minnucci, J.A.
Author_Institution
Spire Corporation Bedford, Massachusetts 01730
Volume
26
Issue
1
fYear
1979
Firstpage
1683
Lastpage
1685
Keywords
Annealing; Conducting materials; Electron beams; Photovoltaic cells; Power transmission lines; Pulsed power supplies; Semiconductor diodes; Semiconductor materials; Silicon; Temperature;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1979.4330462
Filename
4330462
Link To Document