Gas Heating Phenomenon in Rare Gas Dielectric Barrier Discharge for Excimer Lamps

The distribution of the gas temperature, due to the heat Joule effect in dielectric barrier discharge and for different rare gases (Ar, Ne, Xe, and Kr), was investigated using a 1-D time-dependent fluid model. The model is based on the resolution of the transport equation of the electrons and the ions coupled with the Poisson´s equation for a parallel-plate dielectric barrier discharge reactor. To consider of gas heating due to ions and electrons, we solve the heat transport equation along of the discharge gap. The results show an increasing of the gas temperature in front of the dielectrics due to heavy ions for different noble gases used (Ar, Ne, Xe, and Kr). The effect of the applied voltage, the gas pressure as well as the secondary electron emission of MgO bombardment by rare gas ions on the gas temperature is also analyzed.