Manufacturing process of piezoelectric thin-film dual-stage actuator and its reliability for HDD

Author

Kuwajima, Hideki ; Uchiyama, Hirokazu ; Ogawa, Yuko ; Kita, Hiroyuki ; Matsuoka, Kaoru

Author_Institution

HD Dev. Center, Matsushita Electr. Ind. Co. Ltd., Osaka, Japan

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

2156

Lastpage

2158

Abstract

A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives was proposed and developed. This dual-stage actuator device is characterized by the sputter-deposited thin-film PZT, featuring large displacement of 1.2 μm and high-resonance frequency over 15 kHz. In this paper, reliability against temperature, humidity, and mechanical shock was investigated to ensure the practical application to the drive products.

Keywords

disc drives; hard discs; lead compounds; microactuators; piezoelectric actuators; piezoelectric thin films; reliability; sputter deposition; 1.2 micron; 15 kHz; HDD; PZT; PbZrO3TiO3; high-density hard disk drives; high-resonance frequency; humidity reliability; large displacement; magnetic head positioning; manufacturing process; mechanical shock reliability; microactuator; piezoelectric thin-film dual-stage actuator; reliability; sputter-deposited PZT thin-film; temperature reliability; Frequency; Hard disks; Humidity; Magnetic heads; Manufacturing processes; Piezoelectric actuators; Piezoelectric films; Sputtering; Temperature; Thin film devices;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.802798

Filename

1042122