Title :
Low-Loss Differential Semicoaxial Interconnects in CMOS Process
Author :
Jin, Jun-De ; Hsu, Shawn S H ; Yang, Ming-Ta ; Liu, Sally
Author_Institution :
Dept. of Electr. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
Design, characterization, and modeling of differential semicoaxial interconnects based on a standard 0.18-mum CMOS process are presented for the first time. The differential semicoaxial line shows a low differential-mode attenuation constant of ~1.00 dB/mm at 50 GHz and a slow-wave factor above 3.1 over a wide frequency range. The characteristics of differential semicoaxial lines for differential mode, common mode, slow-wave effect, and coupling effect are also investigated in details based on the measured mixed-mode S-parameters. The lumped RLGC circuit is adopted to model the CMOS differential semicoaxial lines. An excellent agreement between the measured and modeled results is obtained up to 50 GHz
Keywords :
CMOS analogue integrated circuits; MMIC; S-parameters; integrated circuit interconnections; 0.18 micron; 50 GHz; CMOS process; common mode semicoaxial lines; coupling effect; differential mode semicoaxial lines; differential semicoaxial interconnects; lumped RLGC circuit; mixed mode S-parameter; slow wave effect; CMOS process; CMOS technology; Coplanar waveguides; Coupling circuits; Crosstalk; Frequency; Integrated circuit interconnections; Microstrip; Semiconductor device modeling; Substrates; CMOS; differential line; lumped $RLGC$; mixed-mode $S$-parameters; semicoaxial interconnects;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2006.886000
