Experiment on the absolute measurement of a silicon lattice spacing at the NRLM

Author

Tanaka, M. ; Nakayama, K. ; Kuroda, Kazuaki

Author_Institution

Nat. Res. Lab. of Metrol., Ibaraki, Japan

Volume

38

Issue

2

fYear

1989

fDate

4/1/1989 12:00:00 AM

Firstpage

206

Lastpage

209

Abstract

An experimental setup for the determination of the silicon lattice constant is described. The monolithic flexure hinge mechanisms for orientation adjustment, an optical interferometer for angle and displacement measurement, and a special tool for establishing the parallelism between the optical surface and the reciprocal lattice vector are introduced. The latest experiment gives a value for the ratio of the optical wavelength to the silicon lattice spacing which is consistent with more established values within a currently large uncertainty of one

Keywords

angular measurement; displacement measurement; elemental semiconductors; lattice constants; light interferometry; silicon; NRLM; Si; absolute measurement; angle measurements; displacement measurement; lattice spacing; monolithic flexure hinge mechanisms; optical interferometer; optical surface; optical wavelength; orientation adjustment; parallelism; reciprocal lattice vector; Atomic measurements; Crystallization; Lattices; Metrology; Optical interferometry; Optical surface waves; Prototypes; Silicon; X-ray imaging; X-ray lasers;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.192273

Filename

192273