• DocumentCode
    845564
  • Title

    Accurate thin film multijunction thermal converter on a silicon chip [AC-DC standard]

  • Author

    Klonz, Manfred ; Weimann, Thomas

  • Author_Institution
    Phys. Tech. Bundesanstalt, Braunschweig, West Germany
  • Volume
    38
  • Issue
    2
  • fYear
    1989
  • fDate
    4/1/1989 12:00:00 AM
  • Firstpage
    335
  • Lastpage
    337
  • Abstract
    The design of a planar, thin-film, multijunction thermal converter (MJTC) on a silicon chip containing a window with a SiO2 membrane for low heat conductance underneath the thermal element is described. This design offers the possibility of mass production of MJTCs. Typical relative AC-DC transfer uncertainties of a few parts in 106 have been measured with CuNi44 heaters. Heater materials with lower Thomson coefficients than CuNi44 should result in uncertainties of a few parts in 107
  • Keywords
    convertors; measurement standards; thermoelectric conversion; thin film devices; AC-DC transfer uncertainties; CuNi44 heaters; Si-SiO2-CuNi; Thomson coefficients; mass production; planar convertor; power convertor; thin film multijunction thermal converter; Analog-digital conversion; Copper; Etching; Mass production; Semiconductor thin films; Silicon; Sputtering; Temperature; Thermal conductivity; Voltage;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.192301
  • Filename
    192301
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=845564