Title :
Accurate thin film multijunction thermal converter on a silicon chip [AC-DC standard]
Author :
Klonz, Manfred ; Weimann, Thomas
Author_Institution :
Phys. Tech. Bundesanstalt, Braunschweig, West Germany
fDate :
4/1/1989 12:00:00 AM
Abstract :
The design of a planar, thin-film, multijunction thermal converter (MJTC) on a silicon chip containing a window with a SiO2 membrane for low heat conductance underneath the thermal element is described. This design offers the possibility of mass production of MJTCs. Typical relative AC-DC transfer uncertainties of a few parts in 106 have been measured with CuNi44 heaters. Heater materials with lower Thomson coefficients than CuNi44 should result in uncertainties of a few parts in 107
Keywords :
convertors; measurement standards; thermoelectric conversion; thin film devices; AC-DC transfer uncertainties; CuNi44 heaters; Si-SiO2-CuNi; Thomson coefficients; mass production; planar convertor; power convertor; thin film multijunction thermal converter; Analog-digital conversion; Copper; Etching; Mass production; Semiconductor thin films; Silicon; Sputtering; Temperature; Thermal conductivity; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
