A phase encoding method for improving the resolution and reliability of laser interferometers [displacement measurement]

Author

Hagiwara, Nobumi ; Nishitani, Youhei ; Yanase, Masaru ; Saegusa, Takeo

Author_Institution

Dept. of Electr. Eng., Nat. Defense Acad., Yokosuka, Japan

Volume

38

Issue

2

fYear

1989

fDate

4/1/1989 12:00:00 AM

Firstpage

548

Lastpage

551

Abstract

An electronic method is proposed for improving the resolution and reliability of a laser interferometer commonly used for measuring displacement. By assigning code numbers to the divided segments of the interference fringe interval, the displacement of the moving device is measured with 1/170 of the lightwave length resolution (about 4 nm with He-Ne laser). Since the error caused by environmental noise is not integrated in the counting process, the measured values become more reliable than those of conventional pulse-counting methods

Keywords

displacement measurement; encoding; helium; light interference; light interferometers; measurement by laser beam; neon; reliability; He-Ne; code numbers; displacement measurement; environmental noise; interference fringe interval; laser interferometers; phase encoding; reliability; Displacement measurement; Encoding; Interference; Interferometers; Interpolation; Optical interferometry; Optical noise; Pulse measurements; Read only memory; Stimulated emission;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.192344

Filename

192344