Title :
Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels [dimension measurement]
Author :
Tanaka, Mitsuru ; Yamagami, Tohru ; Nakayama, Kan
Author_Institution :
Nat. Res. Lab. of Metrol., Ysukuba, Japan
fDate :
4/1/1989 12:00:00 AM
Abstract :
Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally to understand and reduce fringe distortion. An accuracy of 0.1 nm for the 633-nm He-Ne laser interferometer is achieved
Keywords :
calibration; helium; light interferometers; measurement by laser beam; measurement errors; neon; spatial variables measurement; 633 micron; He-Ne; fringe distortion; heterodyne laser interferometer; linear interpolation; nonpolarization heterodyne interferometer; periodic error; subnanometer levels; Electric variables measurement; Interpolation; Laser noise; Optical distortion; Optical interferometry; Optical mixing; Optical modulation; Optical polarization; Optical sensors; Phase measurement;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
