Title :
Room-temperature scanning Hall probe microscope (RT-SHPM) imaging of garnet films using new high-performance InSb sensors
Author :
Oral, A. ; Kaval, M. ; Dede, M. ; Masuda, H. ; Okamoto, A. ; Shibasaki, I. ; Sandhu, A.
Author_Institution :
Dept. of Phys., Bilkent Univ., Ankara, Turkey
fDate :
9/1/2002 12:00:00 AM
Abstract :
High-performance InSb micro-Hall sensors were fabricated by optical lithography and incorporated in a room-temperature scanning Hall probe microscope for imaging of localized magnetic fluctuations in close proximity to the surfaces of crystalline uniaxial garnet films. The room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which is an order of magnitude. better than GaAs-AlGaAs two-dimensional electron gas sensors used to date.
Keywords :
Hall effect transducers; III-V semiconductors; garnets; indium compounds; magnetic sensors; magnetic thin films; microsensors; scanning tunnelling microscopy; surface magnetism; 293 to 298 K; Hall sensor alignment; InSb; STM tracking mode; crystalline uniaxial films; garnet films; high-performance micro-Hall sensors; localized magnetic fluctuations; noise figure; room-temperature scanning microscope imaging; scanning Hall probe microscopy; surface magnetic fields; Garnet films; Gas detectors; Hall effect devices; Image sensors; Magnetic sensors; Optical films; Optical imaging; Optical microscopy; Optical noise; Optical sensors;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2002.803607
