The CantiClever: a dedicated probe for magnetic force microscopy

Author

Van den Bos, Arnout ; Heskamp, Iwan ; Siekman, Martin ; Abelmann, Leon ; Lodder, Cock

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

2441

Lastpage

2443

Abstract

We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using. the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

Keywords

etching; magnetic force microscopy; micromachining; microsensors; silicon; CantiClever probe; Si; batch fabrication; cantilever design; high-resolution; magnetic tip; magnetic-force microscopy cantilever; precise dimensions control; silicon micromachining; single manufacturing process; very thin magnetic element; wet anisotropic etching; Atomic force microscopy; Magnetic anisotropy; Magnetic confinement; Magnetic force microscopy; Magnetic forces; Magnetic materials; Manufacturing processes; Perpendicular magnetic anisotropy; Probes; Shape;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.803585

Filename

1042214