Title :
Constant-temperature integrated vacuum sensor
Author :
Huang, J.B. ; Tong, Q.Y.
Author_Institution :
Nanjing Inst. of Technol., South-East Univ., China
fDate :
11/10/1988 12:00:00 AM
Abstract :
An integrated vacuum sensor based on heat transfer at a constant chip temperature (CCT) is introduced. It consists of a temperature-sensing stage, a CMOS op-amp and a heating branch circuit. All three part are integrated on one chip and connected to form a negative feedback loop for CCT operation. The heating power of the sensor chip was used to indicate the vacuum which affects the heat transfer between the chip and the vacuum ambient
Keywords :
CMOS integrated circuits; electric sensing devices; feedback; vacuum gauges; vacuum measurement; CMOS op-amp; constant chip temperature; heat transfer; heating branch circuit; integrated vacuum sensor; monolithic type; negative feedback loop; sensor chip; temperature-sensing stage;
Journal_Title :
Electronics Letters
