DocumentCode
846279
Title
Constant-temperature integrated vacuum sensor
Author
Huang, J.B. ; Tong, Q.Y.
Author_Institution
Nanjing Inst. of Technol., South-East Univ., China
Volume
24
Issue
23
fYear
1988
fDate
11/10/1988 12:00:00 AM
Firstpage
1429
Lastpage
1430
Abstract
An integrated vacuum sensor based on heat transfer at a constant chip temperature (CCT) is introduced. It consists of a temperature-sensing stage, a CMOS op-amp and a heating branch circuit. All three part are integrated on one chip and connected to form a negative feedback loop for CCT operation. The heating power of the sensor chip was used to indicate the vacuum which affects the heat transfer between the chip and the vacuum ambient
Keywords
CMOS integrated circuits; electric sensing devices; feedback; vacuum gauges; vacuum measurement; CMOS op-amp; constant chip temperature; heat transfer; heating branch circuit; integrated vacuum sensor; monolithic type; negative feedback loop; sensor chip; temperature-sensing stage;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
46087
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