Title :
High-quality solenoid inductor using dielectric film for multichip modules
Author :
Yook, Jong-Min ; Ko, Ju-Hyun ; Ha, Man-Lyun ; Kwon, Young-Se
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea
fDate :
6/1/2005 12:00:00 AM
Abstract :
For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrate. Furthermore, it is possible to stack these inductors to make multichip modules using solder or gold stud bumps. From the measurement, solenoid inductors fabricated on 50-μm-thick film showed very high Q factors and stable inductances.
Keywords :
Q-factor; dielectric materials; dielectric thin films; multichip modules; solenoids; thin film inductors; 50 micron; Q factor; UBE Industries; UPILEX-S; dielectric film; dielectric material; gold stud bump; multichip module; multilayer application; solder bump; solenoid inductor; Dielectric films; Dielectric materials; Gallium arsenide; Multichip modules; Nonhomogeneous media; Q factor; Silicon; Solenoids; Spirals; Textile industry; Dielectric; UPILEX film; multichip module (MCM); solenoid;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2005.848775
