Title :
2-D Measurement of Charged Particles Diffusing From a Double DC Corona Discharge Ionizer
Author :
Takahashi, Koichi ; Sato, Mitsuhisa ; Ohkubo, Tomoki ; Fujiwara, Toshihito ; Takaki, K.
Author_Institution :
Department of Electrical Engineering, Tohoku University, Sendai, Japan
Abstract :
Spatial distributions of charged particles diffusing from a double dc corona discharge ionizer operated in air and nitrogen atmospheres are 2-D measured. It is experimentally demonstrated that static electricity on a silicon wafer downstream side of the ionizer is eliminated only in the area where the local net charge flux becomes zero. The 2-D profiles of the local net ion current clearly show that the spatial profile of the local net ion current can be controlled by a balance between the positive and negative discharge voltages. Hence, it is demonstrated that the balance can yield the control of the charge elimination area.
Keywords :
Atmospheric measurements; Corona; Ionization; Nitrogen; Voltage measurement; Charge elimination; corona discharge; dc ionizer; ion flux; static electricity;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2013.2252610