Fabrication of magnetic dot arrays by ion beam induced chemical vapor deposition (IBICVD)

Author

Lapicki, Adam ; Kang, Kyongha ; Suzuki, Takao

Author_Institution

Inf. Storage Mater. Lab., Toyota Technol. Inst., Nagoya, Japan

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

2589

Lastpage

2591

Abstract

Cobalt dot arrays are fabricated by Ga⁺ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.

Keywords

arrays; chemical vapour deposition; cobalt; discontinuous metallic thin films; ferromagnetic materials; focused ion beam technology; ion beam assisted deposition; ion microscopy; magnetic force microscopy; magnetic recording; nanostructured materials; nanotechnology; quantum dots; transmission electron microscopy; 100 to 150 nm; Co; FIB microscopy; Lorentz transmission electron microscopy; ferromagnetic properties; flat islands; ion beam induced CVD; magnetic dot arrays; magnetic force microscopy; magnetic recording medium; nanotechnology; pattern fabrication; size limitations; Chemical technology; Chemical vapor deposition; Fabrication; Ion beams; Laboratories; Magnetic force microscopy; Magnetic recording; Material storage; Transmission electron microscopy; US Department of Transportation;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.803224

Filename

1042277