Title :
Fabrication of magnetic dot arrays by ion beam induced chemical vapor deposition (IBICVD)
Author :
Lapicki, Adam ; Kang, Kyongha ; Suzuki, Takao
Author_Institution :
Inf. Storage Mater. Lab., Toyota Technol. Inst., Nagoya, Japan
fDate :
9/1/2002 12:00:00 AM
Abstract :
Cobalt dot arrays are fabricated by Ga+ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.
Keywords :
arrays; chemical vapour deposition; cobalt; discontinuous metallic thin films; ferromagnetic materials; focused ion beam technology; ion beam assisted deposition; ion microscopy; magnetic force microscopy; magnetic recording; nanostructured materials; nanotechnology; quantum dots; transmission electron microscopy; 100 to 150 nm; Co; FIB microscopy; Lorentz transmission electron microscopy; ferromagnetic properties; flat islands; ion beam induced CVD; magnetic dot arrays; magnetic force microscopy; magnetic recording medium; nanotechnology; pattern fabrication; size limitations; Chemical technology; Chemical vapor deposition; Fabrication; Ion beams; Laboratories; Magnetic force microscopy; Magnetic recording; Material storage; Transmission electron microscopy; US Department of Transportation;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2002.803224
