Equilateral-Triangle-Resonator Injection Lasers With Directional Emission

Author

Chen, Qin ; Hu, Yong-Hong ; Huang, Yong-Zhen ; Du, Yun ; Fan, Zhong-Chao

Author_Institution

Inst. of Semicond., Acad. Sinica, Beijing

Volume

43

Issue

6

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

440

Lastpage

444

Abstract

Equilateral-triangle-resonator (ETR) lasers with an output waveguide jointed at one vertex of the resonator are fabricated on (100) GaInAsP-InP wafers using photolithography and a two-step inductively coupled plasma (ICP) etching technique. Distinct peaks with the mode spacing of longitudinal mode intervals are observed in the luminescence spectra at room temperature. Furthermore, some minor peaks appear in the middle of the main peaks, which can be attributed to the first-order transverse modes as predicted in the theoretical results. CW directional lasing emissions are achieved for ETR lasers with side lengths ranging from 15 to 30 mum up to 200 K. The temperature dependences of the threshold current and lasing wavelength are measured for an ETR laser with the side length of 20 mum from 80 to 200 K. The observed threshold current rapidly increases as temperature increases over 170 K

Keywords

III-V semiconductors; gallium arsenide; gallium compounds; indium compounds; laser modes; microcavity lasers; photolithography; photoluminescence; semiconductor lasers; sputter etching; stimulated emission; thermo-optical effects; waveguide lasers; 293 to 298 K; 80 to 200 K; GaInAsP-InP; GaInAsP-InP wafers; continuous-wave lasing emission; directional emission; directional lasing emission; equilateral-triangle-resonator lasers; first-order transverse modes; inductively-coupled plasma etching; injection lasers; jointed output waveguide; longitudinal mode intervals; luminescence spectra; microlasers; mode spacing; photolithography; room temperature luminescence; Laser modes; Laser theory; Lithography; Optical coupling; Plasma applications; Plasma temperature; Temperature dependence; Temperature distribution; Threshold current; Waveguide lasers; Equilateral-triangle-resonator (ETR) lasers; laser mode; microlasers; microresonators;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.2007.895667

Filename

4200822